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semiconductor_metrology_tools

Semiconductor Metrology Tools

X-ray metrology solutions from lab to fab

crystallography

Crystallography

X-ray and electron diffraction for crystallography

scattering

X-ray Diffraction & Scattering

X-ray diffractometers for crystalline materials analysis

xrf_spectrometers

XRF Spectrometers

X-ray fluorescence spectrometers for elemental analysis

imaging__nondestructive__testing

Imaging & Non-destructive Testing

Computed tomography and radiography systems for X-ray imaging

thermal__analysis

Thermal Analysis

Thermal and evolved gas analysis instruments for materials characterization

handheld_raman

Handheld Raman spectrometers for materials identification

components

X-ray generators, detectors, optics, and other components

process_control

Process Control

In-line monitoring systems

semiconductor_metrology_tools

Semiconductor Metrology Tools

X-ray metrology solutions from lab to fab

rsmd_wdxrf

Flexible elemental analysis for thin films

xrr_edxrf_optical

XRR, EDXRF & Optical

X-ray and hybrid metrology solutions for blanket and patterned wafers

rsmd_txrf

Wafer surface contamination metrology

rsmd_hrxrd

X-ray metrology for epitaxial films

xrt

Non-destructive dislocation imaging

scattering

X-ray diffraction for crystallographic orientation of wafers and ingots

cdsaxs

X-ray critical dimension metrology

crystallography

Crystallography

X-ray and electron diffractometers and consumables for crystallography

xrd

X-ray Diffraction

X-ray diffractometers for protein and small molecule crystallography

$electron_diffraction$

Electron Diffraction

Electron diffractometer for protein and small molecule crystallography

reagents

Formulations and other consumables for protein crystallization

scattering

X-ray Diffraction & Scattering

X-ray diffraction and scattering analyses for atomic level materials characterization

xrd

X-ray diffractometers for polycrystalline materials characterization

saxs

Small angle X-ray scattering for nanoscale size, shape, and morphology analyses

stress_analysis

Stress Analysis

X-ray diffractometers for non-destructive residual stress analysis

xrf_spectrometers

XRF Spectrometers

X-ray fluorescence spectrometers for elemental analysis

edxrf

Energy dispersive X-ray fluorescence spectrometers for elemental analysis

wdxrf_spectrometers

Wavelength dispersive X-ray fluorescence spectrometers for elemental analysis

txrf

Total reflection X-ray fluorescence spectrometers surface and trace phase analysis

imaging__nondestructive__testing

Imaging & Non-destructive Testing

Non-destructive imaging analysis by X-rays

xray_computer_tomography

X-ray Computed Tomography

Research grade industrial X-ray computed tomography for non-destructive 3D imaging

ndt_products

Radiography instruments for non-destructive testing

molecular_imaging

Molecular Imaging

Multimodal molecular imaging systems for pre-clinical studies

thermal__analysis

Thermal Analysis

Thermal analysis instruments for study of materials thermal characteristics

general_thermal_analysis

General Thermal Analysis

TGA, DTA, DSC, and TMA instruments for materials characterization

evolved_gas_analysis

Evolved Gas Analysis

Evolved gas analysis instruments for materials characterization

components

X-ray sources, detectors, optics, vacuum components, and high-voltage supplies

xray_sources

High-brilliance X-ray sources

optics

X-ray and ultraviolet multilayer and crystalline optics

detectors

Research-grade X-ray detectors

vacuum_feedthroughs

Vacuum Feedthroughs

Vacuum feedthrough components

All Industries

all_applications

Overview of all industries we serve

nanotech_material_science

Nanotechnology & Materials Sciences

Atomic, nano- to micron-scale materials structure analyses

semiconductor_metrology_tools

Semiconductor & Electronic Devices

Metrology tools from lab to fab

biotechnology

Biotechnology & Life Sciences

Atomic, nano- to micron-scale organic materials characterization

environment__energy

Environment & Energy

Mineralogical and elemental analyses for industrial and environmental needs

construction

Mineralogical and elemental analysis for construction materials

safety_security

Safety & Security

Tools for chemical threat identification and forensics

academic_reserach

Academic Research

Analytical instruments for teaching and synchrotron beamline components

nanotech_material_science

Nanotechnology & Materials Sciences

Atomic, nano- to micron-scale materials structure analyses

material_science_research

Materials Science Research

Crystalline structure, nanoscale morphology, and elemental analyses for materials science

nanotechnology

Atomic to nanoscale materials characterization for nanotechnology research

advanced__new_materials

Advanced & New Materials

State-of-the-art analysis techniques developed for advanced and new materials research

chemistry

A wide range of analysis tools for solutions to study liquids, powders, solids, films, or single crystals

coatings_thin_film

Coatings & Thin films

Elemental, crystallographic, and structural characterization tools for coatings and thin films

metal_alloys

Metals & Alloys

Elemental, crystalline phase, and texture analysis for metals and alloys

plastics_polymers

Polymers, Plastics

Analysis tools for additive concentration, percent crystallinity calculation, and advanced materials characterization

composites

High-resolution 3D imaging for characterization of fillers, fibers, pores, and cracks in composites

ceramics

Crystalline phase and elemental analyses for ceramics characterization

semiconductor_metrology_tools

Semiconductor & Electronic Devices

Metrology tools from lab to fab

semiconductor

X-ray Metrology Solutions

electronics

Advanced Analytical Technology in Electronics Research & Quality Control

biotechnology

Biotechnology & Life Sciences

Atomic, nano- to micron-scale organic materials characterization

pharmaceuticals

Pharmaceuticals

Crystalline structure and elemental analyses from drug discovery to process control

life_science_research

Life Science Researches

Protein and small molecule crystallography and various imaging instruments for life science research

biotechnology

Crystalline structure, nanoscale structure, and elemental analyses for engineered biological materials

food_ingredients

Food & Food Ingredients

Elemental analysis and foreign object screening for food and food ingredients safety

cosmetics

Crystalline structure and elemental analyses for R&D, QC, and materials identification for anti-counterfeit prevention

environment__energy

Environment & Energy

Mineralogical and elemental analyses for industrial and environmental needs

battery

Crystalline structure characterization of electrode for R&D and non-destructive imaging for failure analysis

mining_refining

Mining & Refining

Elemental and mineralogical analyses for every stage of R&D and process control

environment__pollution

Environment & Pollution

Heavy metal analysis for contamination monitoring and recycling materials classification

geology__minerals

Geology & Minerals

Mineralogical and elemental analysis for in-depth study of geological specimens, and natural and artificial minerals

petrochemical

Petroleum & Petrochemicals

Mineralogical and elemental analysis for exploration, production, and distribution process

photovoltaics

Crystalline and elemental analyses for thin-film photovoltaic materials

construction

Mineralogical and elemental analysis for construction materials

cement

Elemental and mineralogical analyses from R&D to process control

asphalt

Elemental and mineralogical analyses for developing and formulating asphalt mixes

safety_security

Safety & Security

Tools for chemical threat identification and forensics

drug_hazmat_explosive

Drug, Hazmat & Explosive Screening

Handheld devices for chemical threat identification

forensics

Elemental and mineralogical analyses for forensics

academic_reserach

Academic Research

Analytical instruments for teaching and synchrotron beamline components

education

Affordable and simple analytical instruments for teaching

synchrotron

X-ray detectors and optics for synchrotron beamlines

All Resources

all_resources

Educational events, articles, publications, and other resources

events_webinars

Events & Webinars Calendar

Upcoming events and webinars

newsletters

Rigaku newsletters for materials science, crystallography, X-ray CT, and semiconductor metrology

xray_forum

Rigaku Oxford Diffraction Forum

Find discussions about software, general crystallography issues and more

technique_library

Technique Library

Learn more about techniques for your analysis needs

application__library

Application Library

Find application examples in your field

rigaku_journal

Browse and search Rigaku Journal articles

blogs

Browse Rigaku blogs

on_demand_webinars

On-demand Webinars

Watch on-demand webinars to learn new techniques and industry trends

publications_library

Publication Library

See how our products are used in published journal articles

service_support

Service & Support

Professional and high quality service and support

contact_service

Contact Service

Contact our service help desk

customer_training

Customer Training

Customer training schedule and e-learning courses

about_rigaku 1

Who we are and our history

contact_us

Contact us by email or via form

find_distributor

Find a Distributor

Find a Rigaku distributor in your area

jobs_careers

Find jobs at Rigaku

news_events

News & Press Releases

Browse Rigaku news and press releases

sustainability

Rigaku is working to make a better and more sustainable world

about_us

See an overview of company information

Products

Industries

Resources

Service & Support

About Us

Semiconductor Metrology Tools

Crystallography

X-ray Diffraction & Scattering

XRF Spectrometers

Imaging & Non-destructive Testing

Thermal Analysis

Components

Nanotechnology & Materials Sciences

Semiconductor & Electronic Devices

Biotechnology & Life Sciences

Environment & Energy

Construction

Safety & Security

Academic Research

Resource Libraries

Talk to an Expert

Rigaku Corporation Yamanashi

4495-8, Wakamiko, Sutama-cho

Hokuto-shi, Yamanashi

408-0112, Japan

Phone number +81-551-42-3371

Evolved Gas Analysis Semiconductors Sources SAXS X-ray CT X-ray Topography (XRT) XRD Stress Thermal Analysis Total Reflection XRF (TXRF) WDXRF Detectors NDT