Rigaku cryogenics for the semiconductor industry
In semiconductor fabrication facilities, where uptime is mission critical, the availability of liquid nitrogen (LN2) is often a strategic necessity. But using LN2 normally involves either a complicated, expensive and troublesome integrated cryogenic plumbing system or the use of "roll around" dewars for localized delivery. Associated with availability issues, these dewars are also frequently the source of contamination problems.
The Rigaku NitroGen eliminates problems caused by unwanted particulate contamination associated with dewar movement and filling operations. Like a complicated plumbed-in system, but without the high capital requirements and ongoing maintenance costs, the NitroGen provides for automatic filling of your equipment. This feature also eliminates manual handling of this dangerous cryogen, thereby reducing the risk of worker injury and enhancing productivity.
With decades of global market leadership in the semiconductor industry, our families of products enable everything from in-fab process control metrology to research & development (R&D) for thin film and materials characterization. With global 24/7 service and support, Rigaku delivers cutting edge solutions for yield enhancement and process development.