MFM310 specifications

MFM310 specifications

Wafer size
300mm, 200mm
Load port
FOUP, 2 load ports
MFM310 Dimensions
140W x 341D x 205H (cm)
Heat exchanger dimensions
36W x 83.6D x 85H (cm)
MFM310 power requirements
3-phase, 208VAC, 20A, avg., 2kVA
Heat exchanger power requirements
1-phase, 208VAC, 8A, avg., 0.5kVA
Compressed, dry air requirements
0.5 to 0.7 MPa, 20 l/min
Vacuum requirements
-80 kPa, 20 l/min