Rigaku Joins SiLKnet Alliance

Rigaku Joins SiLKnet Alliance

The Woodlands, TX — October 10, 2002. Rigaku's Semiconductor Division announced that it has joined the SiLKnet Alliance's data network to develop advanced X-ray scattering methods to measure void fraction, film thickness, pore size and pore size distribution of porous SiLK* semiconductor dielectric resin films. The mission of the SiLKnet Alliance is to enable the development of proven, production-ready products and processes that support metrology integration with SiLK at the 130nm technology node and beyond.

With the recent Semicon West introduction of the GXR-300 tool for the measurement of film properties—such as grain size, structural orientation, stress, strain, thickness, density and roughness—on 200 or 300mm wafers, Rigaku is positioned to lead this development initiative. The Rigaku GXR-300 metrology tool represents a leap forward in in-line metrology as it employs a seamless integration of X-ray based Diffractometry, Reflectometry and Fluorescence Spectrometry.

Through its membership in the SiLKnet Alliance, Rigaku will gain access to porous SiLK wafers to support its ongoing development of advanced X-ray based metrology tools to address its customers' varied low-k integration challenges. Furthermore, the SiLKnet Alliance will benefit from Rigaku's market leadership and X-ray expertise to improve customers' ability to successfully integrate SiLK into manufacturable processes.

About the SiLKnet Alliance

The SiLKnet Alliance is the semiconductor industry's first and broadest technical collaboration on low-k materials integration. Since its formation in 2001, the SiLKnet Alliance has seen membership grow to more than 20 semiconductor industry suppliers. These member companies are developing fab-ready materials, equipment and processes that complement SiLK resins and ENSEMBLE* dielectric solutions in every key back-end-of-line (BEOL) manufacturing step—including the clean, CMP, etch, spin-on track, metrology, ashing and test, assembly & packaging process modules. Membership is by invitation only, but non-exclusive to promote a variety of products and processes compatible with SiLK resins for the integrated stacks from The Dow Chemical Company.

Rigaku—Leading With Innovation

Since its inception in Japan in 1951, Rigaku has been at the forefront of analytical and industrial instrumentation technology. Rigaku and its subsidiaries form a global group focused on life sciences and general purpose analytical instrumentation. With hundreds of major innovations to their credit, Rigaku companies are world leaders in the fields of small molecule and protein crystallography, X-ray spectrometry and diffraction, X-ray optics, as well as semiconductor metrology. Rigaku employs over 1,100 people in the manufacture and support of its analytical equipment. Its products are in use in more than 70 countries—supporting research, development, and quality assurance activities. Throughout the world, Rigaku continuously promotes partnerships, dialog, and innovation within the global scientific and industrial community.

For further information, contact:

Rigaku Semiconductor Division
9009 New Trails Drive
The Woodlands, Texas 77381-5209
Tel: (281) 362-2300 ext. 220
Fax: (281) 364-3628
email: infosemi@rigaku.co.jp