TXRF-310 specs

TXRF-310 specifications

  • Size of wafer: 300 mm, 200 mm, and 150 mm
  • Rotating-anode X-ray source
  • Sample stage: XY θ stage
  • Solid-state detector
  • Oil-free electrical transformer
  • Three-beam excitation
  • Automatic optics alignment
  • Data import from external surface defect inspection tool