TXRF-V310 accessories

TXRF-V310 accessories

  • GEM-300 automation software for full factory automation
  • SP-TXRF capability enables mapping of the entire wafer surface
  • ZEE-TXRF capability enables measurements to zero edge exclusion
  • BAC-TXRF capability enables fully-automated front-side and back-side measurements
  • Wafer bevel VPD capability
  • Dual VPD scanning solutions
  • Inserts for VPD droplet collection in vials