TXRF 3800e specs

TXRF 3800e specifications

  • Size of wafer: 200 mm max.
  • Sealed X-ray tube source
  • Sample stage: XY θ stage
  • Liquid nitrogen-free detector
  • Oil-free electrical transformer
  • Dual-beam excitation
  • Automatic optics alignment
  • Zero edge exclusion (ZEE-TXRF) measurement capability
  • Data import from external surface defect inspection tool