WDA-3650 specs

WDA-3650 specifications

  • Sample size: 200mm max.
  • Simultaneous analysis elements: 20 channels max., Fixed type (4Be ~ 92U), Heavy element scan type (22Ti~ 92U)
  • X-ray tube: Rh target, 4kW max.
  • Aperture: 4 selectable among 5mm, 10mm, 15mm, 20mm, 40mm diameter
  • Detector: S-PC, SC, F-PC (PR gas required for F-PC)
  • Sample stage: XY θ stage
  • Analysis spot designation: r, θ designation, r : 1mm step, θ : 1° step; mouse and keyboard input available
  • Sample rotation mechanism: Available for center-point analysis, 6rpm
  • Vacuum pump: Dry pump
  • Stabilizing system: Temperature stabilizer, Automatic vacuum control system
  • Data processing system: PC with Windows 7, Film thickness/concentration simultaneous analysis software, Fundamental Parameters software for thin film analysis
  • Safety standard: Complies with SEMI S2-0310
  • Others: SMIF, through-wall configurations, etc.