Semiconductor metrology

XRF, XRD and XRR for thin film characterization

Semiconductor metrologyRigaku is a pioneer and world leader in designing and manufacturing X-ray based measurement tools to solve semiconductor manufacturing challenges. With about 30 years of global market leadership in the semiconductor industry, our families of products enable everything from in-fab process control metrology to R&D for thin film and materials characterization.

Systems (See all)

MFM310   MFM310
Process XRR, XRF, and XRD metrology tool for patterned wafers; up to 300 mm wafers
  TXRF-310   TXRF-310
Trace elemental surface contamination metrology by TXRF; up to 300 mm wafers
  TXRF 3760   TXRF 3760
Trace elemental surface contamination metrology by TXRF; up to 200 mm wafers
TXRF-V310   TXRF-V310
Ultra-trace elemental surface contamination metrology by TXRF with VPD capability; up to 300mm wafers
  WaferX 310   WaferX 310
In-line, simultaneous WDXRF spectrometer for wafer metal film metrology; up to 300 mm wafers
  WDA-3650   WDA-3650
Simultaneous WDXRF spectrometer for wafer metal film metrology; up to 200 mm wafers
SmartLab   SmartLab
Advanced state-of-the-art high-resolution XRD system powered by Guidance expert system software
  Ultima IV   Ultima IV
High-performance, multi-purpose XRD system for applications ranging from R&D to quality control
  TTRAX III   TTRAX III
World's most powerful θ/θ high-resolution X-ray diffractometer features an in-plane diffraction arm