Coatings

Thickness and composition of thin-films

Every aspect of modern life benefits from coating or thin film technology. Whether a barrier layer film in an integrated circuit chip or a conversion coating on an aluminum beverage can, X-ray analytical techniques are integral to both R&D development, production process control and quality assurance. X-ray fluorescence (XRF) can determine the thickness and elemental composition of metallic coatings. Commonly employed in the semiconductor manufacturing process as a metrology tool, X-ray reflectometry (XRR) is used to measure layer thicknesses in a multi-layer stack of coatings and also can characterize other coating properties like roughness and interlayer diffusion. Emerging as a leading enabler for nano technology research, X-ray diffraction (XRD) and associated techniques are employed to examine the nature of the molecular structure of films. Rigaku technology and experience provide a variety of non-destructive analytical solutions for coating and thin film measurements.

Application bytes on this topic: 

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Systems: 
  NEX QC
Low-cost EDXRF elemental analyzer measures Na to U in solids, liquids, powders and thin-films
    NEX CG
High-performance, Cartesian-geometry EDXRF elemental analyzer measures Na to U in solids, liquids, powders and thin-films
    Mini-Z Series
Tube below, single element WDXRF analyzer for quality control applications
  MiniFlex
New 5th-generation general purpose benchtop XRD system for phase i.d and phase quantification
    Ultima IV
High-performance, multi-purpose XRD system for applications ranging from R&D to quality control
    SmartLab
Advanced state-of-the-art high-resolution XRD system powered by Guidance expert system software
  Supermini200
Benchtop tube below sequential WDXRF spectrometer analyzes F through U in solids, liquids and powders
    ZSX Primus
High power, tube below, sequential WDXRF spectrometer with mapping and superior light element performance
    ZSX Primus II
High power, tube above, sequential WDXRF spectrometer with mapping and superior light element performance