Semiconductor metrology products

TXRF tools
		TXRF 3800e Trace elemental surface contamination metrology by TXRF; up to 200 mm wafers				TXRF 3760 Trace elemental surface contamination metrology by TXRF; up to 200 mm wafers				TXRF 310Fab Trace elemental surface contamination metrology by TXRF; up to 300 mm wafers
		TXRF-V310 Ultra-trace elemental surface contamination metrology by TXRF with VPD capability; up to 300mm wafers
XRF tools
		WaferX 310 In-line, simultaneous WDXRF spectrometer for wafer metal film metrology; up to 300 mm wafers				WDA-3650 Simultaneous WDXRF spectrometer for wafer metal film metrology; up to 200 mm wafers				AZX 400 Sequential WDXRF spectrometer for elemental analysis and thin-film metrology of large and/or heavy samples
Combo tools
		MFM310 Process XRR, XRF, and XRD metrology tool for patterned wafers; up to 300 mm wafers

Rigaku is a pioneer and world leader in designing and manufacturing X-ray based measurement tools to solve semiconductor manufacturing challenges. With over 25 years of global market leadership in the semiconductor industry, our families of products enable everything from in-fab process control metrology to R&D for thin film and materials characterization. Rigaku specializes in making XRF, XRD and XRR metrology tools to measure critical process parameters like thin film: thickness, composition, roughness, density, porosity, and crystal structure. In addition, we offer process TXRF and VPD-TXRF tools for contamination measurement. With global 24/7 service and support, Rigaku delivers cutting edge solutions for yield enhancement and process development.