Semiconductor metrology products

TXRF tools

  TXRF 3800e
Trace elemental surface contamination metrology by TXRF; up to 200 mm wafers
TXRF 3760
Trace elemental surface contamination metrology by TXRF; up to 200 mm wafers
VSEE300
Standalone vapor phase decomposition (VPD) tool
 
  TXRF-310e
Trace elemental surface contamination metrology by TXRF; up to 300 mm wafers
    TXRF-310
Trace elemental surface contamination metrology by TXRF; up to 300 mm wafers
    TXRF-V310
Ultra-trace elemental surface contamination metrology by TXRF with VPD capability; up to 300mm wafers
 
  TXRF-450
Trace elemental surface contamination metrology by TXRF; 450mm and 300 mm wafers
    TXRF-V450
Ultra-trace elemental surface contamination metrology by TXRF with VPD capability; 450mm and 300mm wafers
   

XRF tools   


  WaferX 310
In-line, simultaneous WDXRF spectrometer for wafer metal film metrology; up to 300 mm wafers
    WDA-3650
Simultaneous WDXRF spectrometer for wafer metal film metrology; up to 200 mm wafers
    AZX 400
Sequential WDXRF spectrometer for elemental analysis and thin-film metrology of large and/or heavy samples

Combo tools   


  MFM310
Process XRR, XRF, and XRD metrology tool for patterned wafers; up to 300 mm wafers
 

Rigaku is a pioneer and world leader in designing and manufacturing X-ray based measurement tools to solve semiconductor manufacturing challenges. With over 25 years of global market leadership in the semiconductor industry, our families of products enable everything from in-fab process control metrology to R&D for thin film and materials characterization. Rigaku specializes in making XRF, XRD and XRR metrology tools to measure critical process parameters like thin film: thickness, composition, roughness, density, porosity, and crystal structure. In addition, we offer process TXRF and VPD-TXRF tools for contamination measurement. With global 24/7 service and support, Rigaku delivers cutting edge solutions for yield enhancement and process development.