Semiconductor metrology
Rigaku is a pioneer and world leader in designing and manufacturing X-ray based measurement tools to solve semiconductor manufacturing challenges.
With over 25 years of global market leadership in the semiconductor industry, our families of products enable everything from in-fab process control metrology to R&D for thin film and materials characterization. Rigaku specializes in making XRF, XRD and XRR metrology tools to measure critical process parameters like thin film: thickness, composition, roughness, density, porosity, and crystal structure. In addition, we offer process TXRF and VPD-TXRF tools for contamination measurement.
With global 24/7 service and support, Rigaku delivers cutting edge solutions for yield enhancement and process development.
Learn more about how Rigaku's semiconductor instrumentation can be used for the following applications:
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