TXRF 3750 total reflection XRF contamination metrology tool
The 3750 TXRF has the most advanced features available, including the
patent pending X-Y-θ sample stage system; the
patent pending computer controlled changeable 3 monochromator system; the
in-vacuum wafer robotic transfer system, the patent pending compact rotating
anode X-ray tube system and the new user-friendly windows software operating
system. All of these contribute to higher throughput, higher accuracy and
precision, and easy routine operation for the widest range of analyzable
elements in the industry—Na through U.
All of these features are housed in a new compact and efficient design. The
reliability has been substantially improved with the use of the new patent
pending rotating anode system. The warranted lifetime of some of the anode
components has doubled. Access for all maintenance work is through the front
and rear panels. No access through the side panels is required. Thus, other
cleanroom equipment may be placed next to the TXRF 3750. This represents a
large savings in expensive cleanroom space.
Features
- Rapid analysis results
- Ease of operation
- Compact design
- High power source
- Three beam system