ZSX 400 WDX spectrometer for large samples

Rigaku's ZSX 400 was specifically designed to handle very large and/or heavy samples. Accepting samples up to 400 mm diameter and 30 kg, this system is ideal for analyzing sputtering targets, magnetic disks, or for multilayer film metrology on the next generation of Si wafers.

Features and benefits

• Large sample analysis
  • Sample size up to 400 mm (diameter), 50 mm (thickness), 30 kg (mass)
• Sample adapter system
  • Adaptable to various sample sizes and shape of samples using adapter inserts (made to order)
• Measurement spot
  • 30 mm to 0.5 mm diameter with 5-step automatic selection
• Mapping capability
  • Allows multipoint thickness measurements to check uniformity
• Sample view camera with special lighting (option)
  • Allows the analysis point to be viewed on screen
• General purpose
  • Able to analyze Be - U by high-resolution, high-accuracy WDXRF
  • Wide range composition (ppm to tens of percent) and thickness (sub Å to mm)
• Diffraction interference rejection (option)
  • Provides accurate results for single-crystal substrates
• Compliance with industry standards
  • SEMI, CE marking
• Small footprint
  • 50% footprint of the previous model