Application: Vacuum transport robots


As applications for clean/vacuum robots become more diverse, Rigaku's rotary feedthrough units are con­stantly being designed to satisfy customer specifications. Thanks to Rigaku's advanced technologies, the center deviation has been reduced to support positioning accuracy for large-size Flat Panel Display (FPD) boards and semiconductor wafers. Our products also satisfy diverse customer needs such as those with pressure differential seals or bellows seals (linear reciprocating motion).

Transport Robot

Vacuum Transport Robot

Application detail

  • Tip displacement-free, high-precision, multi-axial seals.
  • The unique magnetic circuit, free from magnetic field interference between the seals, makes multi-axial seals compact.
  • High-precision technologies for producing powerful magnets and pole pieces enable the manufacture of large seals with a diameter of 100 mm or more.
  • Thin, dustproof seals that can withstand pressure differentials of 20 kPa or less.

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