Application: Gas injection



Rigaku gas introduction feedthroughs are designed to transmit gases into vacuum environments or pressurized systems through a magnetic fluid based hermetic seal. Generally, such feedthroughs are passed through the walls of vacuum systems for two purposes.

The most usual application is the introduction of purge gas to protect the seal unit. The other common application is the introduction of reactant gas into equipment from a rotary feedthrough.

In either case, by introducing gas via the rotary feedthrough, the equipment can be made simpler and more efficient.

Arc Discharge Apparatus

Function enhanced products - gas induction type

Rigaku recommends Function Enhanced Products - Gas Induction Type for this application.

Function enhanced products - purge type

Rigaku also recommends Function Enhanced Products - Purge Type for this application.


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