Application: Vacuum chuck mechanism

applications


Semiconductor wafers and flat panel display (FPD) substrates can be attached firmly to a vacuum chuck mechanism without being scratched during transport or during instantaneous high-speed rotation using a spin coater, etc.

Demand is gradually increasing for rotary feedthroughs for use in vacuum chucks because they offer the advantage of allowing the vacuum system to be routed through them, thereby eliminating unnecessary space and complexity. In addition, they provide very stable high speed rotation.

Vacuum Chuck Apparatus

Function enhanced products - gas induction type

Rigaku recommends Function Enhanced Products - Gas Induction Type for this application.

Cantilevered type (F1-20-W)


Ask for more information about our feedthrough products:

request brochure
Request quote

Copyright © 2006-2017, Rigaku Americas Corporation. All rights reserved.