Application: Sputtering systems



Historically magnetic flux leakage was considered unavoidable with rotary feedthroughs, leading to performance degradation in sputtering systems.

However - today - thanks to Rigaku's unique design, it is possible to have a vacuum rotary feedthrough where the magnetic field is no stronger than that of the Earth at a point 10 mm from the case. Thus, you can use these seals throughout your equipment without having to worry about their effect on plasma fields or electron beams.

Vacuum Transport Robot

Cantilevered type (F1-CL series) solid shaft design

Rigaku recommends Solid Shaft - Cantilevered Type for this application.

Cantilevered type (F1-CL)


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