Application: Ion implanter



Ion implantation is a materials engineer­ing process by which ions of a material can be implanted into another solid, thereby changing the physical proper­ties of the solid. Ion implantation is used in semiconductor device fabrication and in metal finishing, as well as various applications in materials science research.

Rigaku's unique technologies enable high-speed rotation while suppressing resonance. Our unique design provides long service lifetimes with less center distortion—even with high temperature, high vacuum, and high load applications. Rigaku can manufacture rotary feedthrough units for use in all types of ion implanter.

Ion Implanter

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