Application: Chemical vapor deposition equipment



After considerable research and testing, Rigaku has succeeded in developing a new ferrofluid that generates hardly any gas at high temperatures.

This new ferrofluid, and the improved rotary feedthrough structure, extends the service life of the rotary feedthrough unit under the severe service conditions observed in chemical vapor deposition (CVD) equipment. The even, smooth rotation contributes to the formation of a film with a uniform thickness.

Vacuum Transport Robot

Cantilevered type (F1-20-W) solid shaft design

Rigaku recommends Solid Shaft - Cantilevered Type for this application.

Cantilevered type (F1-20-W)


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