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Feedthroughs

Metric RMS series

Magnetic fluid (ferrofluid) fills a small annular gap between a rotating shaft and a stationary magnetic pole piece. The gap is part of a high-energy magnetic circuit which includes the shaft and pole piece. The very large magnetic flux in the gap exerts a force on the fluid, holding it in place against pressure difference from atmosphere to vacuum, yielding a dynamic rotary seal in which there is no solid friction. Therefore, very long operating lifetimes are achieved.

Because the magnetic fluid has very low vapor pressure, it remains permanently in place for the entire lifetime of the seal, and does not contaminate the system. Some applications have special requirements (high temperature, highly reactive gases) which can be satisfied by selection of the optimum fluid from our family of fluid materials.

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Metric RMS series magnetic rotary seal unit — rotary feedthrough

Rigaku offers an optimum magnetic rotary sealing system for the introduction of rotary motion into vacuum or pressure atmospheres.

Unlike the conventional rubber seal or mechanical seal, the Rigaku magnetic rotary seal unit is so designed that a magnetic fluid fills the gap between the moving shaft and its stationary housing and that sealing is effected by the action of a powerful magnet without causing friction. This will result in no wearing or minimal heat generation so that long service life is assured. Moreover, based on the principle and magnetic circuit concept unique to Rigaku, this seal unit features high reliability, its attainable differential pressure being 2.5 kg/cm² (standard).

The notable sealing performance of this unit is displayed in the leak rate of 10^-11 torr. liter/sec (He) or less, which is tantamount to no leak, so that a clean vacuum can be maintained. Its long life and high reliability have already been verified by its use as component of high power X-ray generators and semiconductor process equipments.

Rigaku's sophisticated technology has made it possible to introduce rotation over a wide speed range from low to high speeds to broaden further the application field. The Rigaku magnetic rotary seal unit is low in price and quick in delivery.

The Rigaku magnetic rotary seal unit "RMS series" contributes to creation of a clean vacuum.

Typical applications

Wafer vacuum chuck
Stirrer
Vacuum wafer carrier
Single crystal growing equipment
Rotating anode X-ray generator
Epitaxial growing equipment
Ion implanter

Other applications

CVD
Sputter
Etching equipment
Coating equipment
Hard disk drive unit
Optical rotary encoder
Surface treatment equipment

To identify the Magnaseal direct replacement for a Ferrofluidics Corp. product, locate the FFC Part Number/Model Number at the bottom of each column of tabulated data or refer to the Product Cross Reference chart. For FFC products not listed, please contact Rigaku.

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