Omni-Lev^® magnetic levitation rotary actuator

A breakthrough in zero-contamination vacuum motion

Omni-Lev is Rigaku's new rotary actuator system for use in contamination-sensitive applications. Unlike traditional ball bearing based actuators, Omni-Lev is supported entirely by magnetic fields, eliminating contact between moving parts that can generate damaging particles. This invention (patent pending) resulted from a two-year development at Rigaku.

Omni-Lev's non-contact mechanism not only eliminates particulate generation but also eliminates friction, resulting in very accurate positioning, ultra-low shaft runout, very long life and the virtual elimination of maintenance. Another important feature is the all-metal construction, allowing the actuator to be used in UHV-vacuum level environments as well as in corrosive gas or liquid settings, as commonly encountered in semiconductor manufacturing processes. Semiconductor chip companies drove the need for Omni-Lev development, which is a natural outgrowth of Rigaku's vacuum rotary motion feedthrough business.

Features

• Ultra-clean: zero particle generation
• All metal sealed construction
• Zero outgassing
• Zero friction
• Ultra-low runout
• Zero leakage
• UHV compatible
• Gas or liquid compatible
• Corrosive environment compatible
• High temperature tolerance
• Ultra-low vibration
• Ultra-high-speed capable
• Zero maintenance
• No oils or fluids used
• No bearings in vacuum