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High speed RSM of a III-nitride epitaxial film by 1D detection mode

AppNote XRD2024: High speed RSM of a III-nitride epitaxial film by 1D detection mode

 

Reciprocal space mapping (RSM) is an XRD technique used to evaluate lattice spacing and crystal orientation distribution independently from each other, applied to the analysis of thin film samples such as epitaxial films. Since a reciprocal space map requires multiple scans with various combinations of the scattering angle (2θ) and the incident angle with respect to the sample (ω), it can take a relatively long time to collect the necessary data in general. Combination of the 1D exposure mode of a 2D detector and high-speed scanning by the ω axis enables data collection in a very short time, from several tens of seconds to several minutes,

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