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Evaluation of uniformity of a single crystal substrate by rocking curve measurement

AppNote XRD2027: Evaluation of uniformity of a single crystal substrate by rocking curve measurement

 

Crystallographic non-uniformity of single crystal substrates and buffer layers, such as defects and orientation
distribution, may decrease the performance of thin-film devices. XY mapping of the rocking curve allows us to
evaluate the in-plane uniformity of single crystal substrates and buffer layers visually and quantitatively.

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