Skip to main content

Evaluation of curvature of a single crystal substrate by rocking curve measurement

AppNote XRD2031: Evaluation of curvature of a single crystal substrate by rocking curve measurement


Curvature of a single crystal substrate may occur during the thin film fabrication process because of differences in thermal expansion coefficients between the substrate and the film material. Since curvature can affect the subsequent manufacturing process and characteristics of products, quantitative evaluation of the degree of curvature is required. When a single crystal substrate is curved, the orientation of the lattice planes changes depending on the position on the sample. This change can be evaluated by an X-ray rocking curve (XRC) measurement and converted to the curvature radius by a simple equation.

XRD products from Rigaku

Advanced state-of-the-art high-resolution XRD system powered by Guidance expert system software

Highly versatile multipurpose X-ray diffractometer with built-in intelligent guidance

New 6th-generation general purpose benchtop XRD system for phase i.d and phase quantification

Compact X-ray diffractometer for quality control of materials that is easy to use and is ideal for routine work

Laboratory micro-spot XRD residual stress analysis with both iso- and side-inclination methods

Windows®-based software suite for Rigaku's X-ray diffractometers

High-performance, multi-purpose XRD system for applications ranging from R&D to quality control

high energy resolution pixel detector capable of 0, 1, and 2D measurements

2D X-ray detector with latest semiconductor technology designed for home lab diffractometers