Curvature of a single crystal substrate may occur during the thin film fabrication process because of differences in thermal expansion coefficients between the substrate and the film material. Since curvature can affect the subsequent manufacturing process and characteristics of products, quantitative evaluation of the degree of curvature is required. When a single crystal substrate is curved, the orientation of the lattice planes changes depending on the position on the sample. This change can be evaluated by an X-ray rocking curve (XRC) measurement and converted to the curvature radius by a simple equation.
Advanced state-of-the-art high-resolution XRD system powered by Guidance expert system software
Highly versatile multipurpose X-ray diffractometer with built-in intelligent guidance
New 6th-generation general purpose benchtop XRD system for phase i.d and phase quantification
Compact X-ray diffractometer for quality control of materials that is easy to use and is ideal for routine work
Laboratory micro-spot XRD residual stress analysis with both iso- and side-inclination methods
Windows®-based software suite for Rigaku's X-ray diffractometers