Skip to main content

Twist width evaluation of group III-V nitride films by rocking curve measurement

AppNote XRD2034: Twist width evaluation of group III-V nitride films by rocking curve measurement


Deep ultraviolet LEDs are preferable for wide use as an alternative to mercury lamps since they are ultraviolet sources with low environmental impact. In recent years, their sterilization function has been especially attracting great attention, and practical application of this function is expected soon. In order to increase light emission efficiency and carrier lifetime, the quality of the AlN layer, which is the base for the active layer, must be improved. In this measurement example, an appropriate evaluation method was examined for the crystal orientation distribution (twist width) in the in-plane direction, which is used as an indicator of the threading edge dislocation density of the AlN layer.

XRD products from Rigaku

Advanced state-of-the-art high-resolution XRD system powered by Guidance expert system software

Highly versatile multipurpose X-ray diffractometer with built-in intelligent guidance

New 6th-generation general purpose benchtop XRD system for phase i.d and phase quantification

Compact X-ray diffractometer for quality control of materials that is easy to use and is ideal for routine work

Laboratory micro-spot XRD residual stress analysis with both iso- and side-inclination methods

Windows®-based software suite for Rigaku's X-ray diffractometers

High-performance, multi-purpose XRD system for applications ranging from R&D to quality control

high energy resolution pixel detector capable of 0, 1, and 2D measurements

2D X-ray detector with latest semiconductor technology designed for home lab diffractometers