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SiC 3D dislocation image

Below are a 3D image (1.2 mm × 1.2 mm × 0 .4 mm) showing the threading screw dislocation (TSD), threading edge dislocation (TED), and basal plane dislocation (BPD), and their cross-section images. The leftmost figure is a topographic image obtained by the standard transmission geometry.

XRTmicron application: SiC 3D dislocation image