Skip to main content

Analysis of uniaxially oriented film by wide-range RSM

AppNote B-XRD2025: Analysis of uniaxially oriented film by wide-range RSM


Reciprocal space mapping (RSM) is an XRD technique used to evaluate the lattice spacing and orientation distribution of thin film materials, especially for epitaxial films. The TDI (time delay integration) scan mode of a 2-dimensional X-ray detector can obtain wide-range RSM in a relatively short time. The combination of reciprocal lattice simulation with uniaxial orientation, a new function of SmartLab Studio II, can easily evaluate film orientation.

XRD products from Rigaku

Advanced state-of-the-art high-resolution XRD system powered by Guidance expert system software

Highly versatile multipurpose X-ray diffractometer with built-in intelligent guidance

New 6th-generation general purpose benchtop XRD system for phase i.d and phase quantification

Windows®-based software suite for Rigaku's X-ray diffractometers

High-performance, multi-purpose XRD system for applications ranging from R&D to quality control

Laboratory micro-spot XRD residual stress analysis with both iso- and side-inclination methods

2D X-ray detector with latest semiconductor technology designed for home lab diffractometers