Wavelength dispersive X-ray fluorescence (XRF) spectrometers have high spectral resolution and can therefore identify peaks with high accuracy. However, if the analysis line overlaps with a higher order line, peak identification and semi-quantitative analysis results may not be reliable. To perform accurate analysis for such cases, measurement conditions that reduce the influence of the higher order lines need to be set up, followed by remeasuring the sample with the optimized conditions. This can require advanced knowledge of XRF principles and a high level of familiarity with the software. This is not in line with the demand for semi-quantitative analysis being easily and quickly able to give accurate and reliable results for unknown samples.
The new software feature described in this article was developed to overcome this obstacle. It performs semi-quantitative analysis by the FP method using a new procedure that accurately calculates results after the software automatically selects data from the optimal measurement conditions when a higher order line interferes with the analysis line. This allows anyone, including users with little experience in X-ray analysis, to obtain analysis results with higher accuracy and reliability.