Specialized EUV optics
Features
- Au, Ni, Ru etc. optical surface material
- 9.5 mrad grazing angle at the mirror input (R≥ 50%)
- Radiation EUV (60 – 200 eV) soft X-ray (200 – 2000 eV) X-ray (2 – 10 keV)
- elliptical, parabolic, other aspherical optical shapes on request
- Typical surface roughness: Ra ≈ 0.5 – 2 nm
Large specialized optics for EUV and X-ray radiation
Custom designed large optics of various shapes for EUV and X-ray facilities and laboratory sources
Specifications
Micro roughness of NiP layer:
Average Roughness Ra (nm) | Root Mean Square RMS (nm) | |
10 μm × 10 μm | 0.86 | 1.12 |
10 μm × 10 μm | 0.88 | 1.15 |
1 μm × 1 μm | 0.4 | 0.52 |
1 μm × 1 μm | 0.47 | 0.59 |
Micro roughness of Ru layer:
Average Roughness Ra (nm) | Root Mean Square RMS (nm) | |
10 μm × 10 μm | 0.72 | 0.91 |
1 μm × 1 μm | 0.27 | 0.34 |