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For thin-film characterization
An X-ray diffraction technique in which both the incident and diffracted beams are nearly parallel to the sample surface, in-plane diffraction is an important method for thin film characterization. With standard diffraction geometries, such as the Bragg-Brentano geometry, lattice planes are measured that are parallel to the sample surface. X-rays penetrate to a certain depth into the sample, where they are diffracted; however, if the sample layer is too thin, X-rays are completely transmitted by the sample and no diffraction is observed. In these circumstances, in-plane diffraction is used. In-plane diffraction has two major features:
- The penetration depth of the beam is limited to within about 100 nm of the surface.
- The technique measures lattice planes that are (nearly) perpendicular to the sample surface, which are inaccessible by other techniques.
Advanced state-of-the-art high-resolution XRD system powered by Guidance expert system software
High-performance, multi-purpose XRD system for applications ranging from R&D to quality control
World's most powerful θ/θ high-resolution X-ray diffractometer features an in-plane diffraction arm