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Rigaku nano3DX is a true X-ray microscope (XRM) with ultra-wide field of view, 25X larger volume than comparable systems, and three X-ray wavelengths for different matrices.Read more...
HyPix-3000 is a next-generation two-dimensional hybrid pixel array semiconductor detector designed specifically to meet the needs of the home lab diffractionist.Read more...
Analytical solutions by industry
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Special Feature: Pharmaceutical Analysis (5): Analysis of trace impurities in pharmaceutical products using polarized EDXRF spectrometer NEX CG.Read more...
XRF, XRD and XRR for thin film characterization
Rigaku is a pioneer and world leader in designing and manufacturing X-ray based measurement tools to solve semiconductor manufacturing challenges. With about 30 years of global market leadership in the semiconductor industry, our families of products enable everything from in-fab process control metrology to R&D for thin film and materials characterization.
Systems (See all)
Process XRR, XRF, and XRD metrology tool for patterned wafers; up to 300 mm wafers
Trace elemental surface contamination metrology by TXRF; up to 300 mm wafers
Trace elemental surface contamination metrology by TXRF; up to 200 mm wafers
Ultra-trace elemental surface contamination metrology by TXRF with VPD capability; up to 300mm wafers
In-line, simultaneous WDXRF spectrometer for wafer metal film metrology; up to 300 mm wafers
Simultaneous WDXRF spectrometer for wafer metal film metrology; up to 200 mm wafers
Advanced state-of-the-art high-resolution XRD system powered by Guidance expert system software
High-performance, multi-purpose XRD system for applications ranging from R&D to quality control
World's most powerful θ/θ high-resolution X-ray diffractometer features an in-plane diffraction arm