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Rigaku nano3DX is a true X-ray microscope (XRM) with ultra-wide field of view, 25X larger volume than comparable systems, and three X-ray wavelengths for different matrices.Read more...
HyPix-3000 is a next-generation two-dimensional hybrid pixel array semiconductor detector designed specifically to meet the needs of the home lab diffractionist.Read more...
Analytical solutions by industry
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Special Feature: Pharmaceutical Analysis (5): Analysis of trace impurities in pharmaceutical products using polarized EDXRF spectrometer NEX CG.Read more...
Film thickness/composition and wafer contamination tools
Rigaku is a pioneer and world leader in designing and manufacturing X-ray based measurement tools to solve semiconductor manufacturing challenges. With over 25 years of global market leadership in the semiconductor industry, our families of products enable everything from in-fab process control metrology to R&D for thin film and materials characterization. Our XRF, XRD and XRR metrology tools measure critical process parameters like thin film: thickness, composition, roughness, density, porosity, and crystal structure. In addition, we offer process TXRF and VPD-TXRF tools for contamination measurement. With global 24/7 service and support, Rigaku delivers cutting edge solutions for yield enhancement and process development.