Multi Foil Optics for EUV and X-ray radiation

Custom designed KB and Lobster eye optics with a wide FOV

Multi-Foil optics

The products of Rigaku Innovative Technologies Europe (RITE) company, represent the cutting edge in the field of X-ray optics. RITE has outstanding capabilities in ray-tracing, designing, manufacturing and testing of Multi-Foil Optics (MFO). The MFO in general is a soft X-ray and EUV optics which consists of two perpendicular sets of very thin reflecting mirrors, where photons are reflected at grazing angles. MFO is assembled from thin foils (typ. glass, silicon or metal). Various arrangements and geometries are possible (e.g. Lobster Eye, Kirkpatrick-Baez). Rigaku Innovative Technologies Europe manufactures 1D and/or 2D MFO optics. Rigaku offers custom designs which can be rapidly developed and manufactured.


MFO optics

  • Wide FOV (max ±60°)
  • Foil thickness from 30 μm to 1 mm
  • Aperture from 3x3 mm to 300x300 mm
  • Energy range from 50 eV to 10 keV
  • Planar, elliptical, parabolic and general aspheric
  • Glass, silicon and metal
  • Surface - Au, Ni, Mo, Pt, W …

MFO elliptical KB system:

  • energy range: 80 – 120 eV
  • focal length: 440 mm
  • imaging: ~ 1:1
  • FOV: 20°
  • focal spot size: ~ 0.5 – 1.0 mm
  • outer dimensions: 100 x 100 x 100 mm
  • aperture: 75 x 75 mm
  • gold coated mirrors
  • mirror spacing from 1 to 5 mm
  • free space between mirrors (front view): 56%

Lobster Eye:
  • energy range: 5 - 10 keV
  • focal length: 1 000 - 1 200 mm
  • imaging: ~ 1:1
  • FOV: 2°
  • focal spot size: ~ 0.5 mm
  • outer dimensions: 30 x 30 x 65 mm
  • aperture: 18 x 18 mm
  • gold coated mirrors
  • mirror spacing 0.3 mm
  • free space between mirrors (front view): 56%


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