
This sixth generation benchtop diffraction system is a perfect XRD solution for R&D, QA/QC and teaching. Available high-speed detector, sample-changer and monochromator make it incredibly flexible.
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High-resolution X-ray rocking curves can be used to analyze the thickness, composition, and strain state of epitaxial single crystal films. Much of this information can be obtained by simulating and/or fitting the measured rocking curve using X-ray dynamical diffraction theory. In Figure 1, an SiGe film epitaxially grown on top of an Si (001) substrate along with an Si cap layer by molecular beam epitaxy (MBE) was analyzed. The nominal thickness and Ge concentration of the SiGe layer are 50 nm and 20.0%, respectively. The nominal cap layer thickness is 20 nm.
The SmartLab is the most novel high-resolution diffractometer available today. Perhaps its most novel feature is the SmartLab Guidance software, which provides the user with an intelligent interface that guides you through the intricacies of each experiment. It is like having an expert standing by your side. Read more about SmartLab...