Tube-above wavelength dispersive X-ray fluorescence spectrometer

High performance WDXRF for rapid quantitative elemental analysis

ZSX Primus II

Rigaku ZSX Primus II delivers rapid quantitative determination of major and minor atomic elements, from beryllium (Be) through uranium (U), in a wide variety of sample types — with minimal standards.

Tube above optics for superior reliability

ZSX Primus II features an innovative optics-above configuration. Never again worry about a contaminated beam path or down time due to sample chamber maintenance. The optics-above geometry eliminates cleaning worries and increases up time.

Low-Z performance with mapping and multi-spot analysis

Providing superior performance with the flexibility for analyzing the most complex samples, the ZSX Primus II features a 30 micron tube, the thinnest end-window tube available in the industry, for exceptional light element (low-Z) detection limits. Combined with the most advanced mapping package to detect homogeneity and inclusions, the ZSX Primus II allows easy detailed investigation of samples that provide analytical insights not easily obtained by other analytical methodologies. Available multi-spot analysis also helps to eliminate sampling errors in inhomogeneous materials.

SQX fundamental parameters with EZ-scan software

EZ-scan allows users to analyze unknown samples without any prior setup. This time saving feature requires only a few clicks of the mouse and a sample name to be entered. Combined with SQX fundamental parameters software, it provides the most accurate and rapid XRF results possible. SQX is capable of automatically correcting for all matrix effects, including line overlaps. SQX can also correct for secondary excitation effect by photoelectrons (light and ultra-light elements), varying atmospheres, impurities and different sample sizes. Increased accuracy is achieved using matching library and perfect scan analysis programs.

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  • Analysis of elements from Be to U
  • Tube above optics minimizes contamination issues
  • Small footprint uses less valuable lab space
  • Micro analysis to analyze samples as small as 500 µm
  • 30μ tube delivers superior light element performance
  • Mapping feature for elemental topography/distribution
  • Helium seal means the optics are always under vacuum

ZSX Primus II specifications

  Elemental coverage ₄Be through ₉₂U
  Optics Wavelength dispersive, sequential, tube above
X-ray generator
  X-ray tube End window, Rh-anode, 3kW or 4 kW, 60kV
  HV power supply High frequency inverter, ultra-high stability
  Cooling Internal water-to-water heat exchanger
  Sample changer 48 positions standard, 96 optional
  Sample inlet APC automatic pressure controller
  Maximum sample size 51 mm (diameter) by 30 mm (high)
  Sample rotation speed 30 rpm
  Primary X-ray filters Al25, Al125, Ni40 and Ni400
  Beam collimators 6 auto-selectable diameters: 35, 30, 20, 10, 1 and 0.5 mm
  Divergence slit 3 auto-selectable: standard, high, and coarse (optional) resolutions
  Receiving slit For SC and for F-PC detectors
  Goniometer θ – 2θ independent drive mechanism
  Angular range SC: 5-118°, F-PC: 13-148°
  Angular reproducibility Ultra-high precision
  Continuous scan 0.1 - 240°/min
  Crystal changer 10 crystals, automatic mechanism
  Vacuum system 2 pump high-speed system w/ (optional) powder trap
  He flush system Optional, with partition
Detector systems
  Heavy element detector Scintillation counter (SC)
  Light element detector Flow proportional counter (F-PC)
  Attenuator In-out automatic exchanger (1/10)
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ZSX Primus II software


  • Qualitative analysis:
    • Automatic peak identification
    • Smoothing, background subtraction
  • Quantitative analysis:
    • Matrix correction: Lachance-Traill, DeJohngh, JIS, etc.
    • Linear, quadratic and cubic regression, multiple line
    • Fundamental parameter method
  • EZ scan (qualitative)
  • Application template
  • Analysis area automatic selection (mask size detection)
  • Peak deconvolution (function and standard profile)
  • Background fitting (multi-point function fitting, area designation)
  • Fixed precision analysis
  • Help function
  • E-mail forwarding function
  • Universal standard sample
  • Analysis simulation program (analysis depth evaluation, etc.)


  • SQX program
    • EZ scan (SQX)
    • Fixed angle measurement
    • Thin-film analysis
    • Theoretical overlap correction
    • Drift correction library
    • Photoelectron FP method
    • He atmosphere correction
    • Sample film correction
      • Impurity correction
      • Matching library
      • SQX scatter FP method
      • Material judgment
  • Quantitative scatter FP method
  • Quantitative FP theoretical overlap correction
  • Fusion disk correction (flux evaporation)
  • Charge correction
  • Program operation
    • Time preset analysis
    • Energy saving
    • Auto power off
  • Sample observation mechanism
  • Point/mapping function
  • Remote control function (VCP)


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