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XRD, XRR and SAXS for nano-scale characterization

Spanning a wide range of research fields, such as biology, chemistry, physics, and engineering, nanotechnology is uniquely interdisciplinary in character. The common factor in nanotechnology is the lateral dimension of the structures studied. Defined as materials being in, or having components in, the one billionth (10⁻⁹) of a meter range, nanotechnology research and development relies on accurate measurement of atomic and molecular distances within structures ranging from semiconductor devices to nano-powders. Since the dimensions of X-ray wavelengths are of the same magnitude as the size of nanostructures, X-ray diffraction (XRD) and associated techniques are primary tools for the nanotechnology researcher. X-ray reflectometry (XRR) determines layer thickness, roughness, and density. High-resolution X-ray diffraction can measure layer thickness, roughness, chemical composition, lattice spacing, relaxation and more. X-ray diffuse scattering is used to determine lateral and transversal correlations, distortions, density, and porosity. In-plane gracing incidence diffraction is employed to study lateral correlations of thinnest organic and inorganic layers as well as depth profiling. Finally, small angle X-ray scattering (SAXS) can determine the size, shape, distribution, orientation, and correlation of nano-particles present in solids or solutions. Rigaku technology and expertise are combined to provide a number of X-ray diffraction products for nanotechnology applications.

Rigaku recommends the following systems:


Sistema avanzado de rayos XRD de alta resolución y tecnología de punta, impulsado por el software del sistema experto Guidance

Difractómetro de rayos X multipropósito altamente versátil con guía inteligente incorporada

Sistema XRD multipropósito de alto rendimiento para aplicaciones que van desde I+D hasta el control de calidad.


Instrumento de dispersión de rayos X por ángulo amplio y pequeño diseñado para el análisis de nanoestructuras.

Small and wide angle X-ray scattering instrument designed for nano-structure analyses

X-ray CT

High-speed, stationary sample microtomography of large samples