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Speakers

SPEAKER 7

Senior Executive Vice President | General Manager
X-ray Instruments Division and Semiconductor Metrology Division

Forty-five years of X-ray research experience using synchrotron radiation Photon Factory in Tsukuba and SPring-8 in Hyogo worked for Hitachi in thin film process and packaging process development by utilizing new X-ray characterization techniques. During this time, he was involved in numerous developments and inventions in the X-ray characterization field.

His experience is valuable in judging the feasibility and leading the direction of innovative development. Kiyoshi Ogata has published 75 patents on thin film devices and metrology methods.

In 1986 Kiyoshi Ogata received a Ph. D in Physics (X-ray crystallography using synchrotron radiation) from the University of Tokyo and joined Hitachi, Ltd. (23 years), developing metrology and thin film process technologies, especially for semiconductor and LCD. In 1996 he became a member of the CVD group, Hitachi Semiconductor Division. His achievements positioned him in 2004 as Director of the Process Technology Department, Packaging Technology Department, and Production Engineering Research Laboratory of Hitachi.

Dr. Ogata joined Rigaku Corporation in 2009 and has worked as SBU manager for semiconductor metrology business tools. In 2023 he was promoted to Senior Executive Vice Presidency of Rigaku and continues as the General Manager of both Rigaku Semiconductor Metrology Division (RSMD) and X-ray Instrument Division.

Paul Van Der Heide

Director of Materials and Component Analysis (MCA)

Paul is the Director of the Materials and Component Analysis (MCA) department at imec, in Leuven, Belgium. The scope of MCA is a) to support the materials characterization needs of imec’s nanotechnology R&D programs (capabilities include APT, ARPES, ERD, Raman, RBS, SIMS, SPM, TEM, UPS, XPS, ...), and b) to explore, develop and implement the materials characterization capabilities required by tomorrow’s IC industry.

Prior to moving to imec, Paul held positions at GLOBALFOUNDRIES, Malta, NY, USA (where he headed the end-to-end analytical labs support for high volume semiconductor device manufacturing and R&D), Samsung, Austin, TX, USA (where he established and managed the surface characterization labs for supporting high volume semiconductor device manufacturing), and the University of Houston, TX, USA (where he lectured in physical chemistry and surface analysis, while also managing the MRSEC SIMS-XPS facility).

Paul earned a PhD in Physical Chemistry from the University of Auckland, New Zealand (topic concerned the design and construction of a magnetic sector SIMS instrument), has authored/co-authored over to 200 publications, has presented ~20 invited and 2 plenary talks, and is sole author of two books published through Wiley.

Books

Andrea Severino

Born in Catania in 1980, Andrea Severino graduated in Physics at the University of Catania in 2004 with a thesis on the study of thermal stability of nickel silicide. Then, he received the title of Doctor of Philosophy (Ph.D.) in 2008 in Materials Science awarded by the University of Catania. The research was conducted mainly in the SiC group at the Institute of Microelectronics and Microsystems (IMM) of the CNR, Catania. During his Ph.D., he spent a period of 6 months as a visiting scholar at the Department of Electronic Engineering, University of South Florida (USF) in Tampa (USA). From 2008 to 2012, he was a post-doc research fellow at IMM-CNR and, for a period of six months (first half of 2012), he worked for ETC-LPE (now LPE ASM) on SiC CVD growth. Currently, he is working for STMicroelectronics, where he was hired in 2012, working as expert in MOCVD growth of GaN and non-conventional thin dielectric films. During the following years, he grew experience in the R&D department with industrial vision and today the core of activity is focused on the growth and advanced analytical techniques required by wide bandgap materials (WBG), mainly SiC and GaN, starting from basics study, material and processes characterization and development up to industrialization release. Main topics are SiC Substrates and Epitaxy Characterization, SiC Front-End Processing, GaN Epitaxy and Characterization, WBG defectivity.

He is leading a new advanced characterization lab for WBG material using non-standard ST Catania techniques. So far, the number of publications produced is over 100 in several scientific journals and patents.

Abner Bello Manager, Specialty Measurements

Abner Bello currently leads the Specialty Measurements Group at Corning, which supports research, development and manufacturing by designing and integrating custom metrology equipment. He has more than 25 years of experience in metrology, primarily in the semiconductor industry where he has worked at GlobalFoundries, Applied Materials, and Rudolph Technologies. He holds a Ph.D. in Applied Science from the University of California at Davis/Livermore for his work on metal multilayer characterization.

Alessandra Alberti Senior researcher

Alessandra Alberti received her Ph.D. in Physics in 1999 and has been working as a researcher at the National Research Council of Catania, Institute of Microelectronics and Microsystems (CNR-IMM) since January 2001. With several financed projects, she leads the research activities at CNR-IMM on Solar Cells based on Hybrid Perovskite (PSC), the new breakthrough technology in the renewable energy field for efficient solar energy harvesting. She is additionally involved in research initiatives and activities in the field of microelectronics, with a special focus on metallisation schemes with silicides for high-performance electronic devices. In partnership with STMicroelectronics, she gained Italian and US patents for innovative metallization processes in silicon-based power devices and MOX-based gas sensors. Toin University in Yokohama and Tokyo University in Japan (Prof. T. Miyasaka), CNRS and Minatec in Grenoble (France), and Synchrotron Radiation facilities (SOLEIL, ESRF) in France are among her international collaborations on the abovementioned topics. She is the author of over 150 JCR publications, has supervised Masters, PhD, and postdoctoral students, and serves as a reviewer for multiple JCR journals.

Jean Fompeyrine

Jean Fompeyrine holds a Ph.D. in Solid State Chemistry. He joined IBM Research GmbH in 1996 as a scientist to develop novel materials and device concepts for information technologies. He focused on innovative solutions for advanced CMOS technologies, for integrated photonics or for alternative computing schemes. He is author or co-author of over 200 research contributions and holds over 35 patents. He is co-founder and director of Lumiphase AG and drives the development of the materials technology which is at the core of the company.

Christian Reimann

Studied mineralogy in Mainz and Cologne, followed by a PhD in the field of crystallization of silicon for photovoltaics at the Friedrich-Alexander University Erlangen. Since 2010 group leader, since 2015 deputy head of the department Semiconductor Materials at Fraunhofer IISB in Erlangen. Since 2021 Head of the Center of Competence X-ray Topography at Fraunhofer IISB. His scientific expertise ranges from crystal growth and material characterization to high temperature resistant coatings. He was awarded the Solar-World Junior Einstein Award in 2010 and the Ulrich-Gösele Young Scientist Award in 2012 for his work on the formation and avoidance of harmful SiC and Si3N4 particles during directional solidification of solar silicon. He is also the author and co-author of numerous scientific publications and patents and is a certified business developer.

Boris Metodiev

Boris is an Associate Director in the Manufacturing Analysis team at TechInsights, focusing on research management in the semiconductor, equipment and electronics markets.

Prior to TechInsights, Boris has been working for research firms like Strategy Analytics, 451 Research and Yankee Group, specializing in mobile and connected devices, vendor strategies, technology innovation, mobile OS and ecosystems. Boris is an experienced industry analyst, often quoted in media publications, and with a busy conference and vendor briefing schedule.

Laith Altimime

As President of SEMI Europe, Laith Altimime leads SEMI’s activities in Europe and Middle East and Africa (EMEA). Altimime has P&L responsibility as well as ownership of all Europe region programs and events, including SEMICON Europa. He is responsible for establishing industry Standards, advocacy, community development, expositions, and programs. He provides support and services to SEMI members worldwide that have supply chain interests in Europe. He manages and nurtures relationships with SEMI members in the region and globally as well as with local association and constituents in industry, government, and academia. Altimime has more than more than 30 years of international experience in the semiconductor industry. Prior to joining SEMI in 2015, He held senior leadership positions at NEC, KLA-Tencor, Infineon, Qimonda and imec. Altimime holds an MSc from Heriot-Watt University, Scotland.

D.J. Rogers

Dr. David Rogers received his PhD in Physics from the University of Glasgow (Scotland) in 1990. His early research career was at Philips Central Research Laboratories (Netherlands), Carnegie Mellon University (US) and Nippon Telephone and Telegraph (Japan)). In 2001 he co-founded Nanovation (www.nanovation.com), which is a French company specialised in the development, fabrication and commercialisation of novel oxide semiconductors. Dr. Rogers is the author/co-author of 23 patents, over 130 publications and has received numerous prizes. He is also an organiser and a regular invited speaker at international conferences. In parallel with developing Nanovation, Dr. Rogers has pursued an academic career as a lecturer at the University of St Andrews (UK), an Associate Professor at the University of Technology of Troyes (France) and a visiting Professor at the Indian Institute of Technology (Jodhpur). He is currently an Adjunct Professor at the University of Technology of Sydney.

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