Semiconductor metrology

XRF, XRD and XRR for thin film characterization

Rigaku is a pioneer and world leader in designing and manufacturing X-ray based measurement tools to solve semiconductor manufacturing challenges. With about 30 years of global market leadership in the semiconductor industry, our families of products enable everything from in-fab process control metrology to R&D for thin film and materials characterization.

Systems (See all)

		MFM310 Process XRR, XRF, and XRD metrology tool for patterned wafers; up to 300 mm wafers				TXRF-310 Trace elemental surface contamination metrology by TXRF; up to 300 mm wafers				TXRF 3760 Trace elemental surface contamination metrology by TXRF; up to 200 mm wafers
		TXRF-V310 Ultra-trace elemental surface contamination metrology by TXRF with VPD capability; up to 300mm wafers				WaferX 310 In-line, simultaneous WDXRF spectrometer for wafer metal film metrology; up to 300 mm wafers				WDA-3650 Simultaneous WDXRF spectrometer for wafer metal film metrology; up to 200 mm wafers
		SmartLab Advanced state-of-the-art high-resolution XRD system powered by Guidance expert system software				Ultima IV High-performance, multi-purpose XRD system for applications ranging from R&D to quality control				TTRAX III World's most powerful θ/θ high-resolution X-ray diffractometer features an in-plane diffraction arm