Shintaro Kobayashi and Katsuhiko Inaba
The various XRD techniques as the characterization tools for thin film samples have been presented in this series of “X-ray thin-film measurement technique” lecture course. There has heretofore been remarkable progress with detectors equipped with XRD apparatus. In this lecture, some explanation of the features and functions of 1-dimensional (1D)/2-dimensional (2D) detectors should be presented before summarizing this technical lecture course.