X-ray fluorescence spectrometry (XRF) is well known as an analysis method with high precision by means of non-destructive and no contact analysis, and is therefore widely used for process and quality control at production sites.
In particular, total reflection X-ray fluorescence spectrometry (TXRF) developed in the 1970s is a special energy dispersive type XRF which excites elements only on the surface of sample.
TXRF has been one of the standard methods for wafer contamination analysis. However, TXRF has recently been gaining attention as a new technique for analysis of environmental samples.
Benchtop TXRF spectrometers are manufactured by a few companies in the world, but no models other than the original NANOHUNTER has the highly advanced functions such as auto alignment of the optical system. The new TXRF spectrometer NANOHUNTER II, which is improved by the employment of newly developed components, is introduced here.