Rigaku recommends the following systems: 
MFM310   Process FAB metrology
In-line process XRF, XRD, and XRR tools
  SmartLab   Lab XRD / SAXS
From phase analysis to thin-film thickness and molecular structure
  NEX CG   Lab XRF
Thickness and elemental composition of thin films

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Film thickness/composition and wafer contamination tools


Rigaku is a pioneer and world leader in designing and manufacturing X-ray based measurement tools to solve semiconductor manufacturing challenges. With over 25 years of global market leadership in the semiconductor industry, our families of products enable everything from in-fab process control metrology to R&D for thin film and materials characterization. Our XRF, XRD and XRR metrology tools measure critical process parameters like thin film: thickness, composition, roughness, density, porosity, and crystal structure. In addition, we offer process TXRF and VPD-TXRF tools for contamination measurement. With global 24/7 service and support, Rigaku delivers cutting edge solutions for yield enhancement and process development.