Multi-Foil Optics for EUV and X-ray radiation

Multi-foil Optics
Soft X-ray and EUV optics
Features

MFO optics:

  • Wide FOV (max ±60°)
  • Foil thickness from 30 μm to 1 mm
  • Aperture from 3x3 mm to 300x300 mm
  • Energy range from 50 eV to 10 keV
  • Planar, elliptical, parabolic and general aspheric
  • Glass, silicon and metal
  • Surface - Au, Ni, Mo, Pt, W …

MFO elliptical KB system:

  • energy range: 80 – 120 eV
  • focal length: 440 mm
  • imaging: ~ 1:1
  • FOV: 20°
  • focal spot size: ~ 0.5 – 1.0 mm
  • outer dimensions: 100 x 100 x 100 mm
  • aperture: 75 x 75 mm
  • gold coated mirrors
  • mirror spacing from 1 to 5 mm
  • free space between mirrors (front view): 56%

Lobster Eye:

  • energy range: 5 - 10 keV
  • focal length: 1 000 - 1 200 mm
  • imaging: ~ 1:1
  • FOV: 2°
  • focal spot size: ~ 0.5 mm
  • outer dimensions: 30 x 30 x 65 mm
  • aperture: 18 x 18 mm
  • gold coated mirrors
  • mirror spacing 0.3 mm
  • free space between mirrors (front view): 56%

Multi-Foil Optics for EUV and X-ray radiation

Custom designed KB and Lobster eye optics with a wide FOV

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Features | Specifications
 

Multi-foil optics

Extending the replicated optics technologies, Rigaku Innovative Technologies Europe (RITE) designs and produces Multi Foil Optics (MFO). These specialty optics are perfectly suited for applications where low energies and a very wide field of view is needed.

RITE's products represent the cutting edge in the field of X-ray optics. RITE has outstanding capabilities in ray-tracing, designing, manufacturing and testing of Multi-Foil Optics (MFO). The MFO in general is a soft X-ray and EUV optics which consists of two perpendicular sets of very thin reflecting mirrors, where photons are reflected at grazing angles. MFO is assembled from thin foils (typ. glass, silicon or metal). Various arrangements and geometries are possible (e.g. Lobster Eye, Kirkpatrick-Baez). Rigaku Innovative Technologies Europe manufactures 1D and/or 2D MFO optics. Rigaku offers custom designs which can be rapidly developed and manufactured.

Specifications
Product name Multi-foil optics
Technique 1D and/or 2D MFO optics
Benefit Wide field of view
Technology Custom made optics
Core attributes Wide field of view, long focal distances
Core options Lobster Eye and KB system
Core dimensions Varies with configuration
Mass (core unit) Varies with configuration