EUV replicated optics
Features
- Optical surface material: Au, Ni, Ru, Mo, etc…
- Most advanced replication technology
- Spectral range: EUV (60 – 200 eV)
- Soft X-ray (200 – 2000 eV)
- Hard X-ray (2000 – 10000 eV)
- Optical shape: elliptical, parabolic and other aspherical shapes available upon request
- Typical surface roughness: Ra ≈ 0.3 – 2 nm
- Typical dimensions: Diameter (D): 5 – 250 mm
- Length (L): 10 – 130 mm
Higher performance through better layer coatings
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![]() Au vs. Ru, up to 2x higher reflectivity using ruthenium layer |