Specialized EUV optics
Large specialized optics for EUV and X-ray radiation
Custom designed large optics of various shapes for EUV and X-ray facilities and laboratory sources
Specifications
Micro roughness of NiP layer:
Average Roughness Ra (nm) | Root Mean Square RMS (nm) | |
10 μm × 10 μm | 0.86 | 1.12 |
10 μm × 10 μm | 0.88 | 1.15 |
1 μm × 1 μm | 0.4 | 0.52 |
1 μm × 1 μm | 0.47 | 0.59 |
Micro roughness of Ru layer:
Average Roughness Ra (nm) | Root Mean Square RMS (nm) | |
10 μm × 10 μm | 0.72 | 0.91 |
1 μm × 1 μm | 0.27 | 0.34 |