Advanced state-of-the-art high-resolution XRD system powered by Guidance expert system software
Highly versatile multipurpose X-ray diffractometer with built-in intelligent guidance
EDXRF multi-element process analyzer; analyze aluminum (Al) through uranium (U)
Scanning multi-element process coatings analyzers for web or coil applications
In-line, simultaneous WDXRF spectrometer for wafer metal film metrology; up to 300 mm wafers
Simultaneous WDXRF spectrometer for wafer metal film metrology; up to 200 mm wafers
Sequential WDXRF spectrometer for elemental analysis and thin-film metrology of large and/or heavy samples
XRF and optical metrology tool for blanket and patterned wafers; up to 300 mm wafers