In-line, simultaneous WDXRF spectrometer for wafer metal film metrology; up to 300 mm wafers
Sequential WDXRF spectrometer for elemental analysis and thin-film metrology of large and/or heavy samples
High-power, tube-below, sequential WDXRF spectrometer with new ZSX Guidance expert system software
This versatile X-ray metrology tool enables high-throughput measurements on blanket wafers ranging from ultra-thin single-layer films to multilayer stacks for process development and film quality control.
Benchtop tube below sequential WDXRF spectrometer analyzes O through U in solids, liquids and powders
High power, tube above, sequential WDXRF spectrometer with new ZSX Guidance expert system software