High-resolution benchtop microtomography of large samples
Advanced state-of-the-art high-resolution XRD system powered by Guidance expert system software
High-speed, stationary sample microtomography of large samples
High-performance, Cartesian-geometry EDXRF elemental analyzers for measuringes Na to U in solids, liquids, powders and thin films
Ultra-high resolution nanotomography using parallel beam geometry
In-line, simultaneous WDXRF spectrometer for wafer metal film metrology; up to 300 mm wafers
Simultaneous WDXRF spectrometer for wafer metal film metrology; up to 200 mm wafers
Sequential WDXRF spectrometer for elemental analysis and thin-film metrology of large and/or heavy samples
Process XRR, XRF, and XRD metrology tool for blanket and patterned wafers; up to 300 mm wafers
Trace elemental surface contamination metrology by TXRF; up to 200 mm wafers.