EDXRF multi-element process analyzer; analyze aluminum (Al) through uranium (U)
Scanning multi-element process coatings analyzers for web or coil applications
Process sulfur analysis by X-ray transmission (X-ray absorption)
In-line, simultaneous WDXRF spectrometer for wafer metal film metrology; up to 300 mm wafers
Simultaneous WDXRF spectrometer for wafer metal film metrology; up to 200 mm wafers
Sequential WDXRF spectrometer for elemental analysis and thin-film metrology of large and/or heavy samples
Process XRR, XRF, and XRD metrology tool for blanket and patterned wafers; up to 300 mm wafers
Trace elemental surface contamination metrology by TXRF; up to 200 mm wafers.
High-resolution benchtop microtomography of large samples